Introduced 16 years ago, VEGA was the first SEM system delivered by TESCAN now matured in the third generation. It has a proven valuable track record for reliability and performance and rightly established TESCAN as a world-leader in the field of charged particle optics. VEGA3 is a thermionic emission SEM system that comes either with tungsten heated filament or lanthanum hexaboride (LaB6) as electron source.

VEGA3 is a versatile system intended for both low and high vacuum operations providing users with the advantages of the latest technology, such as new improved high-performance electronics for faster image acquisition, an ultra-fast scanning system with compensation for static and dynamic image aberrations or scripting for user-defined applications. In addition, by means of powerful turbo-molecular and rotary vacuum pumps, optimum operating vacuum is reached within few minutes. VEGA3 microscopes can be configured in 4 different chamber sizes: SB, LM, XM, and GM. These chambers are fitted with a variety of ports and designed with optimal geometry for EDXWDX and EBSD analysis. The VEGA series was designed with respect to a wide range of SEM applications and needs in today’s research and industry. VEGA3 is an excellent choice for those looking for a reliable and fully functional entry-level SEM system maintaining the best price-to-performance ratio.

Key features

  • Unique four-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimisation
  • The proprietary Intermediate Lens (IML) that works as an „Aperture Changer“ makes the exchange of the effective final aperture in an electromagnetic way
  • Real time In-Flight Beam Tracing™ for the performance and beam optimisation integrating the well-established software Electron Optical Design
  • The column construction, without any mechanical centring elements, allows fully automated column set-up and alignment
  • High-throughput large-area automation, e.g. automated particle location and analysis
  • Superior specimen handling using a fully motorized compucentric stage
  • Ideal geometry for EDXWDXEBSD; non-distorted EBSD pattern
  • Fast and easy obtaining of the clean chamber vacuum by powerful turbomolecular and rotary fore vacuum pump
  • Fully automated microscope set-up including electron optics set-up and alignment
  • Sophisticated software for SEM control, image acquisition, archiving, processing and analysis; multi-user environment localised in many languages
  • Network operations and built-in remote access/diagnostics, all come as the TESCAN standard
  • Unique live stereoscopic imaging utilizing the 3D Beam Technology